Press Release

NSK's Exhibit at SEMICON® Japan 2013

Exhibit of New Technology to Support the Development of the Next Generation of Semiconductor Manufacturing Equipment

セミコン・ジャパン2013 NSKブース

Tokyo, Japan, December 27, 2013 – NSK Ltd. (NSK; Headquarters: Tokyo, Japan; President and CEO: Norio Otsuka) exhibited its products and technologies related to semiconductor manufacturing at SEMICON® Japan 2013, held at the Makuhari Messe Convention Center (Chiba, Japan) from December 4 to 6.
NSK sincerely appreciates the interest of the many visitors who stopped by its exhibit. Crowds of visitors asked many questions and provided a great deal of valuable feedback on NSK technologies and products that contribute to development of next-generation semiconductor equipment. SEMICON Japan 2013 was a great success, and NSK was proud to be a part of it.
For those who were not able to make it this year, NSK put together the following highlights of this year's exhibit.

Main Exhibits

E-DFO Bearings and E-DFO Ball Screws for Vacuum Environment Applications
Advanced thin-coat lubrication for longer life in vacuum environments
New Monocarrier™ Lineup
New lineup of faster, quieter and higher load capacity Monocarriers

E-DFO Bearings and E-DFO Ball Screws for Vacuum Environment Applications

New Monocarrier(TM) Lineup
Air Bearing Slide for Super-High-Precision Positioning (for TSV, etc.)
Realization of made-to-order, compact design
Ball Screw with Minimal Grease Splatter L1 Seals
Reduced grease splatter for cleaner equipment and work environment

Air Bearing Slide for Super-High-Precision Positioning

Ball Screw with Minimal Grease Splatter L1 Seals
Ultra Fast Takt Time Demonstration: Two Axis Precision Synchronous Positioning
PX series Megatorque Motor™ and miniature long-lead ball screw combined for the super-high-speed operations needed in inspection equipment applications
X-Z Transfer Unit for 450mm FOUP
Toughcarrier™ with high rigidity and high capacity using vertical axis specification with DD motor and long-lead ball screw for compact, yet high-speed conveyance of 100kg loads

Ultra Fast Takt Time Demonstration: Two Axis Precision Synchronous Positioning

X-Z Transfer Unit for 450mm FOUP
Megatorque Motor™ for MECHATROLINK-III
Making multi-axis, high-speed synchronized operations possible

Megatorque Motor(TM) for MECHATROLINK-III