Press Release

NSK Develops High-Precision Vertical Axis Table

Exhibits at SEMICON Japan 2015

High-Precision Vertical Axis Table

NSK Ltd. (NSK; Headquarters: Tokyo, Japan; President and CEO: Toshihiro Uchiyama) today announced that it will exhibit its products and technologies at SEMICON Japan 2015, to be held at Tokyo Big Sight (Koto-ku, Tokyo) from Wednesday, December 16 to Friday, December 18.

NSK has responded to the needs of next-generation semiconductor manufacturing equipment by developing a high-precision vertical axis table. It will display this newly developed product along with its popular air slide and positioning table for vacuum conditions.

Development Background

As the electronic components used in smartphones and tablets becomes more compact, miniaturized and three-dimensional in layout, the production equipment thereof has become more advanced, driving the need for higher performance and precision levels in positioning tables used with such production equipment.

Over the years, NSK has developed many elemental components needed for making positioning tables more advanced.

  • High-speed, Low-noise Ball Screw II, High-Performance Precision Ball Screw, Ball Screw with Minimal Grease Splatter
  • NSK Linear Guide™NH Series, NS Series
  • Industrial Machinery High-Performance Standard Bearings - NSKHPS Series

Features of the High-Precision Vertical Axis Table

  • An air bearing is used in the vertical guide to achieve a straightness reproducibility of±0.1㎛ or less*1
  • The newly developed, self-weight canceling mechanism helps achieve a more compact drive motor design (50% smaller)
  • Meets CLASS 1 clean levels, the highest in ISO standards*2
  • The wedge mechanism enables high-precision positioning in the vertical direction

*1:0.1㎛ is 1/10,000mm

*2: ISO CLASS 1 is 10 or fewer 0.1㎛ size or smaller particles per cubic meter

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It continues to contribute to the development of environmentally friendly products in the industrial machinery field.