Vacuum Bearings

Overview

YS High-Temperature Bearings with Spacer Joints

Vacuum bearings are a standard line in our SPACEA Series for special environments.

Further specialized SPACEA bearings are available for corrosive, cleanroom, and high-temperature applications.


Product List

FG9 Grease-Packed Bearings

FG9 grease-packed stainless steel bearings are suitable for cleanroom environments at atmospheric pressure or in vacuum.

Features

  • Low grease scatter and particle emissions
  • Corrosion resistant

Applications

  • Semiconductor manufacturing equipment
  • Organic electro-luminescence (OEL) manufacturing equipment
DGBB

Hybrid bearings combine ceramic balls with fluororesin self-lubricating cages to achieve excellent resistance to corrosion at both atmospheric pressure and in vacuum.

Features

  • Grease-free
    Lubrication provided by solid lubricant eliminates the need for grease.
  • Self-lubricating cage
    A fluororesin cage provides continuous lubrication from a solid lubricant.

Applications

  • Transport/conveyance equipment in vacuum
  • Inspection equipment
Deep Groove Ball Bearings SPACEA Cleanroom Environments E-DFO

DFO bearings feature special lubrication coatings applied to the rings, balls, and cage to deliver superior cleanliness and long-life.

The E-DFO specification uses a low-vapor-pressure hydrocarbon lubricant coating, while V-DFO uses a fluorine oil lubricant coating.

These new-concept bearings are suited for cleanroom environments at atmospheric pressure and in vacuum.

Features

  • Low particle emissions
    Specialized cleanroom grease keeps generated particles low.
  • Low outgassing

Applications

  • Semiconductor manufacturing equipment
  • Organic electro-luminescence (OEL) manufacturing equipment
YS High-Temperature Bearings with Spacer Joints

YS bearings with spacer joints use an alloy-based self-lubricating material (sintered alloy) between the balls to stand up to high-temperature vacuum environments.

Features

  • Suited for high-temperature vacuum
    YS bearings stand up to vacuum environments with temperatures up to 350°C.
  • Long life
    Solid lubricant spacers lubricate the bearing and extend life.

Applications

  • Ion implanters
  • Sputtering equipment
Deep Groove Ball Bearing, Spacea, High-Temp, 2Comp

SJ bearings have a “peapod” structure, with solid lubricant spacer joints mounted between two balls in a single cage pocket, making them suited for high-temperature environments at atmospheric pressure or in vacuum.

Features

  • Suited for high temperatures
    SJ bearings withstand temperatures up to 400°C in both atmospheric pressure and vacuum environments.
  • Long life
    Solid lubricant provided by the spacers and a unique cage structure extend bearing life.

Applications

  • Transport/conveyance equipment in furnaces
  • High-temperature film manufacturing equipment
Deep Groove Ball Bearing, Spacea, All-Ceramic, 2Comp

With ceramic outer/inner rings and balls, all-ceramic bearings have self-lubricating fluororesin cages to achieve excellent resistance to corrosion in nonmagnetic environments at atmospheric pressure and in vacuum.

Features

  • Non-magnetic construction
    An all-ceramic structure gives these bearings the highest resistance to corrosion.
  • Long-life
    Anti-wear properties contribute to long operating life.

Applications

  • Semiconductor manufacturing equipment
  • Organic electro-luminescence (OEL) manufacturing equipment

Catalogs


Industry Applications