Cleanroom Bearings

Overview

Deep Groove Ball Bearings SPACEA Cleanroom Environments E-DFO

Cleanroom bearings aim for zero particle emissions.

By applying NSK's unique technologies, our range of offerings excel across environments at atmospheric pressure, in vacuum, and with high temperatures.


Product List

LG2/LGU Clean Grease-Packed Bearings

LG2 and LGU grease-packed stainless steel bearings are suitable for cleanroom environments at atmospheric pressure with normal temperatures.

Features

  • Low grease scatter and particle emissions
  • Long life

Applications

  • Cleanrooms
  • Film manufacturing equipment
DL2 Grease-Packed Bearings

DL2 grease-packed stainless steel bearings are suitable for cleanroom environments at atmospheric pressure or in vacuum.

Features

  • Low grease scatter and particle emissions
  • Superior heat resistance
    Specialized DL2 grease supports higher operating temperatures.

Applications

  • Semiconductor manufacturing equipment
  • Film manufacturing equipment
Deep Groove Ball Bearings SPACEA Cleanroom Environments E-DFO

DFO bearings feature special lubrication coatings applied to the rings, balls, and cage to deliver superior cleanliness and long-life.

The E-DFO specification uses a low-vapor-pressure hydrocarbon lubricant coating, while V-DFO uses a fluorine oil lubricant coating.


These new-concept bearings are suited for cleanroom environments at atmospheric pressure and in vacuum.

Features

  • Low particle emissions
    Specialized cleanroom grease keeps generated particles low.
  • Low outgassing

Applications

  • Semiconductor manufacturing equipment
  • Organic electro-luminescence (OEL) manufacturing equipment

Catalogs


Industry Applications